REMOVAL OF SILANE GAS BY ABSORPTION INTO ALKALINE SOLUTIONS: ALKALINE HYDROLYSIS OF SILANE

Abstract The kinetics and mechanism of the hydrolysis of silane gas in an alkaline solution were investigated by chemical absorption method using a bubble column reactor. The rate of alkaline hydrolysis of silane gas in aqueous sodium hydroxide solutions could be expressed as first-order with respect to both silane and sodium hydroxide concentrations. The second-order reaction rate constant and the Henry's law constant of silane gas in sodium hydroxide solutions were determined at temperatures ranging from 293 to 313 K and 0.10 MPa total pressure.