金属间化合物
材料科学
引线键合
铜
透射电子显微镜
扫描电子显微镜
冶金
可靠性(半导体)
铜线
钯
复合材料
化学
纳米技术
合金
热力学
电气工程
催化作用
工程类
功率(物理)
炸薯条
物理
生物化学
作者
Hyun Woong Park,Sangjun Lee,Dong-Chul Cho,Sang‐Hoon Lee,Jae-Kyun Kim,Jun‐Hee Lee,Sang-Kyo Jung,Hong-Sik Nam,Po-Chin Hsu,Shin Low,Sung‐Hwan Lim
标识
DOI:10.1016/j.microrel.2018.10.014
摘要
A comparative study of the differences in the interfacial behaviors of thermally aged bare Cu wire, Pd-coated Cu wire and Pd-Au-coated Cu wire with Al pad was conducted using scanning electron microscopy and transmission electron microscopy. During high-temperature lifetime testing of these wires bonded with Al pads at 150 °C for up to 1500 h, different growth rates and growth characteristics were investigated in CuAl intermetallic compounds (IMCs), in this case Cu9Al4, CuAl and CuAl2. Because continuously uniform distributions of Pd and PdAu in the Cu wire formed in the upper IMC area, the bonding reliability and the IMC growth rate were improved. The formation of a completely solid solution was considered to have improved the bonding reliability by protecting the IMC from the propagation of micro-cracks.
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