High-power 910 nm vertical-cavity surface-emitting laser arrays for light detection and ranging

We present monolithic 910-nm high power vertical-cavity surface-emitting laser (VCSEL) module suitable for longdistance LIDAR (Light Detection and Ranging). The 910-nm high-power VCSEL array is finely designed and fabricated. The output power of a single VCSEL array (163 devices) reaches nearly 2 W under QCW operation, without being cooled. Driven by the external current source, the peak output power of a single VCSEL array reaches 25.5 W under pulsed operation with a repetition frequency of 10 kHz and a pulse width of 30 ns. To improve the pusled performance of VCSEL array, the monolithic VCSEL array module with integrated driver is developed. The peak output power of this module reaches nearly 85W. And its optical pulse width is 22 ns only. Thus integrated driver circuits demonstrate much better pulsed properties. The ranging setup is built and the detection distance of more than 20 m is realized. We believe that this monolithic VCSEL array with high power, dense package and superior impulse response has great commercial potential in future applications requiring intelligent driving like LIDAR for automotive.