High‐temperature multilayer actuators based on CuO added BiScO3–PbTiO3 piezoceramics and Ag electrodes

Abstract High‐temperature multilayer actuators based on Cu doping 0.367BiScO 3 –0.633PbTiO 3 ceramic slices and Ag electrodes were prepared by low‐temperature co‐firing technology. The 0.3 wt% CuO addition has effectively reduced the sintering temperature of the ceramic from ~1080 to 930°C, thus the multilayer actuator were sintered at 930°C which is lower than the Ag melting point, that is, 961°C. The 4.3 mm thick multilayer actuator is composed of a series of ~44‐μm‐thick ceramic slices and ~2‐μm‐thick Ag electrodes. As a result, a ≥0.13% strain with nm‐scale preciseness can be produced in the actuator by 200 V driving voltage not only at room temperature but also at a high temperature up to 200°C. This actuator is essential for industrial machinery that requires nm‐scale position control at 20‐200°C.