材料科学
氧化物
光子学
纳米技术
光电子学
金属
晶体管
冶金
电气工程
工程类
电压
作者
Emre Yarali,Christina Koutsiaki,Hendrik Faber,Kornelius Tetzner,Emre Yengel,P. Patsalas,N. Kalfagiannis,Demosthenes C. Koutsogeorgis,Thomas D. Anthopoulos
标识
DOI:10.1002/adfm.201906022
摘要
Over the past few decades, significant progress has been made in the field of photonic processing of electronic materials using a variety of light sources. Several of these technologies have now been exploited in conjunction with emerging electronic materials as alternatives to conventional high temperature thermal annealing offering rapid manufacturing times and compatibility with temperature-sensitive substrate materials among other potential advantages. A review of recent advances in photonic processing paradigms of metal oxide thin film transistors (TFTs), is presented with particular emphasis on the use of various light source technologies for the photochemical and thermochemical conversion of precursor materials or post-deposition treatment of metal oxides and their application in thin-film electronics. The pros and cons of the different technologies are discussed in light of recent developments and prospective research in the field of modern large-area electronics is highlighted.
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