The Various MEMS Methods to Build TFTC Sensors for Related Aero-/Astro- Applications

View Video Presentation: https://doi.org/10.2514/6.2021-1399.vid Elevating the intelligent level of the aero-/astro-systems requires smart sensors to get the inner massage and monitor the internal state. For example the accurate measurements of surface temperature of the critical component like the nozzle guide vane plays an indispensable role to optimize the dynamic balance between the high temperature and the cooling effect on turbine blade: the higher the combustion temperature is, the higher the aero-engine efficiency; but the turbine alloy materials cannot stand for it, so it needs to be cooled down. Yet this cooling reduces the efficiency accordingly. Therefore, to grasp the balance point, we need to know what exactly the temperature is, in order to achieve the most optimal efficient operation. This AI-driven (Artificial Intelligence) intelligent aero- and astronautic system is the future trend and the smart sensors built via the multi-disciplines efforts such as MEMS set the basic ground to build smarter machines. In this report various MEMS techniques are described to build smart sensors on the turbine blade surface. Various tests were proposed and performed to verify the functionality and robustness of such sensors for real engineering infield use. In addition to this, various application situations were also formulated / proposed to make use of these various sensor-built methods to fit in various aero-/astro- development/engineering scenarios.