Finite Element Modeling and Simulations of Film Bulk Acoustic Wave Coupling Resonator Filters

1D equivalent circuit model can't be used to simulate the vibration modes of filter.So,2D and 3D FEM models of filters were built.Then,the vibration modes at symmetry and dissymmetry frequencies were analyzed.In the end,the S parameters of filter were computed by frequency response analysis.The results show that FEM can be used to design the geometry parameters and electrode structure of CRF.