Large area smoothing of optical surfaces by low-energy ion beams

Abstract This contribution focuses on ion beam-assisted processes targeted at the preparation of ultra-smooth surfaces with root mean square (rms) roughness values Rq 0.1 μm−1). These smoothing techniques were discussed for common optical substrate materials like silicon, quartz glass and a special glass ceramic. By optimization and combination of these different techniques a sub-nanometer scale roughness reduction down to 0.1 nm was demonstrated. Due to the application of broad beam ion sources the results are also applicable to large-scale optical components.