退火（玻璃）
材料科学
锐钛矿
残余应力
溅射
薄膜
复合材料
沉积（地质）
冶金
化学工程
纳米技术
化学
光催化
生物
工程类
古生物学
催化作用
生物化学
沉积物
作者
Hsi-Chao Chen,Kuan-Shiang Lee,Cheng-Chung Lee
标识
DOI：10.1364/oic.2007.tua4
摘要
TiO2 films were prepared by different deposition methods. At sputtering, stress was released after annealing. At evaporation, XRD showed the anatase crystal. TiO2 films deposited by sputtering were more stable than by evaporation during annealing.
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