脉冲激光沉积
薄膜
材料科学
沉积(地质)
退火(玻璃)
钛酸锶
分析化学(期刊)
钙钛矿(结构)
碳膜
钛酸铅
矿物学
铁电性
光电子学
纳米技术
化学
复合材料
结晶学
电介质
古生物学
色谱法
沉积物
生物
作者
Jie Shang,Dingzhang Wu,Yongli Li,Xiaofang Zhou,Pengxiang Zhang
标识
DOI:10.1016/j.jcrysgro.2010.03.012
摘要
Lead magnesium niobate–lead titanate ((1−x)Pb(Mg1/3Nb2/3)O3–xPbTiO3 (x=0.20,0.33,0.50), PMN–PT) thin films have been successfully deposited on SrTiO3(1 0 0) substrates by pulsed laser deposition (PLD). The result of X-ray diffraction (XRD) showed that the PMN–PT thin films were c-orientated. The effects of deposition conditions, such as deposition temperature, deposition oxygen pressure, pulsed laser repeated frequency, cooling rate, pulsed laser energy and post annealing, were studied first on thin-film quality. It was found that the deposition temperature was very different for the different mole fractions of the thin films. The range of the deposition temperature of high-qualitied thin films is very narrow, about ±2 °C. Such harsh conditions are rare in other thin films, which is also the main reason why PMN–PT thin films are very difficult to prepare.
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