Impact of 100 MeV high-energy proton irradiation on β-Ga2O3 solar-blind photodetector: Oxygen vacancies formation and resistance switching effect

β-Ga2O3 based solar-blind photodetectors have strong radiation hardness and great potential applications in Earth's space environment due to the large bandgap and high bond energy. In this work, we investigated the photoelectric properties influence of β-Ga2O3 photodetector irradiated by 100 MeV high-energy protons which are the primary components in the inner belt of the Van Allen radiation belts where solar-blind photodetectors mainly worked. After proton irradiation, due to the formation of more oxygen vacancies and their migration driven by bias at the metal/semiconductor interface, transportation of carriers transforms with electron tunneling conduction for low-resistance state and thermionic emission for high resistance state. As a result, the current–voltage curves of β-Ga2O3 solar-blind photodetectors exhibit apparent hysteresis loops. The photoresponsivity of β-Ga2O3 photodetectors slightly increases from 1.2 × 103 to 1.4 × 103 A/W after irradiation, and the photoresponse speed becomes faster at a negative voltage while slower at positive voltage. The results reveal the effects of high-energy proton irradiation on β-Ga2O3 solar-blind photodetectors and provide a basis for the study of their use in a radiation harsh environment.