等离子体增强化学气相沉积
化学气相沉积
高分辨率透射电子显微镜
石墨烯
拉曼光谱
扫描电子显微镜
材料科学
透射电子显微镜
化学工程
沉积(地质)
碳纤维
等离子体
纳米技术
分析化学(期刊)
化学
复合数
复合材料
光学
有机化学
古生物学
物理
工程类
量子力学
沉积物
生物
作者
Ngo Quang Minh,Ngo Van Nong,Ma Shanlene D.C. Dela Vega,Osamu Oda,Masaru Hori
出处
期刊:Vacuum
[Elsevier]
日期:2023-07-01
卷期号:213: 112118-112118
被引量:1
标识
DOI:10.1016/j.vacuum.2023.112118
摘要
We report a novel structure of carbon nanowalls (CNWs) synthesized by a two-step growth method using a radical injection plasma-enhanced chemical vapor deposition (RI-PECVD) as combined with a capacitively coupled plasma chemical vapor deposition (CCP-CVD). Scanning electron microscopy (SEM) observation shows that the CNWs grown by this method exhibit a multi-branched morphology with an average wall distance of ∼20 nm and a density of ∼74 wall units/μm2, which is more than 5 times higher than that of CNWs synthesized by the single-step RI-PECVD method. These branched-CNWs are crystalline and comprised of multilayer graphene as confirmed by the Raman and high-resolution transmission electron microscopy (HRTEM) analyses. A static water contact angle of 150° was obtained for the multi-branched CNWs indicating a superhydrophobic property. A possible growth mechanism of the branched-CNWs was also proposed through the investigation of the time-dependent growth from the second step.
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