氢
氢传感器
材料科学
谐振器
聚焦离子束
梁(结构)
石墨烯
光电子学
灵敏度(控制系统)
重复性
离子束
航程(航空)
离子
共振(粒子物理)
光学
纳米技术
原子物理学
化学
电子工程
复合材料
物理
钯
生物化学
有机化学
工程类
色谱法
催化作用
作者
Wei Ding,Shen Liu,Peijing Chen,Bonan Liu,Hang Xiao,Xin Ding,Ying Wang,Yiping Wang
标识
DOI:10.1109/jlt.2023.3337285
摘要
We introduce a hydrogen sensor based on a beam-structured optomechanical resonator engraved by the FIB (focused ion beam) in a graphene-Au-Pd nanofilm, suspending on the tip of the optical fiber. The hydrogen concentration can be measured by monitoring the resonance frequency change which attribute to the mechanical stress changes associated with hydrogen. The sensor responds linearly in a wide concentration range of from 0 to 4.5%. The sensitivity of proposed sensor can be calculated to be 95.7 kHz/% with a shift of 445.11 kHz. Due to its excellent repeatability in the measurement process, such a sensor may be used practically for hydrogen gas with high concentrations.
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