辐照
材料科学
电介质
光电子学
介电损耗
硅
异质结
辐射
半导体
抵抗
纳米技术
图层(电子)
光学
物理
核物理学
作者
Guanghui Zhang,Zeng-hui Yang,Xiaoshi Li,Shuairong Deng,Yang Liu,Hang Zhou,Maoyang Peng,Zhengping Fu,Rui Chen,Dechao Meng,Le Zhong,Quanfeng Zhou,Su‐Huai Wei
出处
期刊:ACS applied electronic materials
[American Chemical Society]
日期:2024-01-29
卷期号:6 (2): 1339-1346
被引量:23
标识
DOI:10.1021/acsaelm.3c01646
摘要
The performance of integrated circuits (ICs) deteriorates under irradiation. It is commonly believed that passive components in the IC such as through-silicon vias (TSVs) are insensitive to radiation damages. However, we find a counterexample by studying the effect of gamma-ray irradiation on a TSV, where its alternating current (AC) properties change significantly due to an emerging dielectric loss peak after irradiation, and the peak shifts toward lower frequencies at higher radiation doses. We propose a mechanism of the observed irradiation effect on the AC properties based on correlations between macroscopic and microscopic phenomena, and the emerging dielectric loss peak is attributed to the formation of a layer of border oxide traps (BTs). The defect-based analysis indicates that the AC dielectric loss due to gamma-ray irradiation is not restricted to TSVs but should also be applicable to other semiconductor devices with Si/SiO2 interfaces. Our work provides not only an approach for the quantitative characterization of BTs but also a practical approach to resist AC irradiation damage at the circuit or material level.
科研通智能强力驱动
Strongly Powered by AbleSci AI