Development of a Cesium Vapor MEMS Cell for Differential Measurement of Microwave Electromagnetically Induced Transparency

In this paper, we develop a cesium vapor MEMS cell with dual-cavity to measure the electromagnetically induced transparency (EIT) effect. The vapor cell was shaped by a deep-etching silicon wafer and two BF33 glass covers with a two-step anodic bonding process. By using a near-infrared spectroscopy laser with the wavelength of 1455 nm, the cesium dispenser sealed in the vapor cell was dispensed. The Rydberg EIT spectra of the fabricated vapor MEMS cell were characterized experimentally and enhanced effectively by introducing two paths probe laser (852 nm). This proposal provides a sensitive and miniaturized sensing method for the measurement of the EIT effect and has a prospect for the applications of integrated quantum microwave field intensity meter.