Micromechanical Piezoelectric Micromachined Ultrasonic Transducer array package enhancement with integrated frontliners

Abstract In order to improve the susceptibility of ultrasonic transducers to damage and the mismatch in acoustic impedance with test specimens, an impedance-matching layer is introduced between the transducer and the specimen. The impact of the matching layer on acoustic propagation of transducer was analyzed through acoustic field simulation. The performance of the improved transducer was experimentally evaluated by using a dedicated echo testing system for transducers. The matching layer was optimized by considering different materials. The results indicate that the inclusion of the matching layer can enhance the acoustic performance of the transducer.