原子层沉积
材料科学
电润湿
薄膜
电介质
光电子学
能量收集
泄漏(经济)
激发
电容
电流密度
纳米技术
能量(信号处理)
电气工程
电极
宏观经济学
化学
经济
物理化学
工程类
物理
统计
数学
量子力学
作者
Hwichul Yang,Soonwook Hong,Bongjun Koo,Dohaeng Lee,Young‐Beom Kim
出处
期刊:Nano Energy
[Elsevier]
日期:2016-11-10
卷期号:31: 450-455
被引量:51
标识
DOI:10.1016/j.nanoen.2016.11.006
摘要
Reverse electrowetting-on-dielectric (REWOD), which is a novel technology for energy harvesting, was demonstrated by depositing Al2O3 via atomic layer deposition (ALD). Specifically, thin layers of Al2O3 about 100 nm-thick were successfully formed by ALD to obtain dense films with high capacitances. REWOD with the ALD Al2O3 thin films exhibited high performances under low-voltage and low-excitation-frequency conditions. The maximum power density was 11 mW/cm2 with a DC bias of 24 V and an external excitation frequency of 2 Hz. Moreover, ALD and sputtered thin films were compared by investigating their capacitances and leakage current densities. Due to the differences between the film densities and growth methods, the ALD thin films exhibited higher capacitances and lower leakage current densities. It was also determined that the leakage current affects the REWOD energy harvesting performance. By analyzing these features, it was confirmed that ALD thin films are suitable for REWOD energy harvesting.
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