High‐Mobility Multilayered MoS2 Flakes with Low Contact Resistance Grown by Chemical Vapor Deposition

Advanced MaterialsVolume 29, Issue 13 1604540 Communication High-Mobility Multilayered MoS2 Flakes with Low Contact Resistance Grown by Chemical Vapor Deposition Jingying Zheng, Jingying Zheng Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084 ChinaSearch for more papers by this authorXingxu Yan, Xingxu Yan National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093 ChinaSearch for more papers by this authorZhixing Lu, Zhixing Lu Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084 ChinaSearch for more papers by this authorHailong Qiu, Hailong Qiu Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084 ChinaSearch for more papers by this authorGuanchen Xu, Guanchen Xu Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084 ChinaSearch for more papers by this authorXu Zhou, Xu Zhou State Key Laboratory for Mesoscopic Physics, Collaborative Innovation Center of Quantum Matter, School of Physics, Center for Nanochemisty, Peking University, Beijing, 100871 ChinaSearch for more papers by this authorPeng Wang, Peng Wang National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093 ChinaSearch for more papers by this authorXiaoqing Pan, Xiaoqing Pan National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093 China Department of Chemical Engineering and Materials Science, University of California–Irvine, Irvine, CA, 92697 USA Department of Physics and Astronomy, University of California–Irvine, Irvine, CA, 92697 USASearch for more papers by this authorKaihui Liu, Kaihui Liu State Key Laboratory for Mesoscopic Physics, Collaborative Innovation Center of Quantum Matter, School of Physics, Center for Nanochemisty, Peking University, Beijing, 100871 ChinaSearch for more papers by this authorLiying Jiao, Corresponding Author Liying Jiao lyjiao@mail.tsinghua.edu.cn Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084 ChinaE-mail: lyjiao@mail.tsinghua.edu.cnSearch for more papers by this author Jingying Zheng, Jingying Zheng Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084 ChinaSearch for more papers by this authorXingxu Yan, Xingxu Yan National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093 ChinaSearch for more papers by this authorZhixing Lu, Zhixing Lu Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084 ChinaSearch for more papers by this authorHailong Qiu, Hailong Qiu Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084 ChinaSearch for more papers by this authorGuanchen Xu, Guanchen Xu Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084 ChinaSearch for more papers by this authorXu Zhou, Xu Zhou State Key Laboratory for Mesoscopic Physics, Collaborative Innovation Center of Quantum Matter, School of Physics, Center for Nanochemisty, Peking University, Beijing, 100871 ChinaSearch for more papers by this authorPeng Wang, Peng Wang National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093 ChinaSearch for more papers by this authorXiaoqing Pan, Xiaoqing Pan National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing, 210093 China Department of Chemical Engineering and Materials Science, University of California–Irvine, Irvine, CA, 92697 USA Department of Physics and Astronomy, University of California–Irvine, Irvine, CA, 92697 USASearch for more papers by this authorKaihui Liu, Kaihui Liu State Key Laboratory for Mesoscopic Physics, Collaborative Innovation Center of Quantum Matter, School of Physics, Center for Nanochemisty, Peking University, Beijing, 100871 ChinaSearch for more papers by this authorLiying Jiao, Corresponding Author Liying Jiao lyjiao@mail.tsinghua.edu.cn Key Laboratory of Organic Optoelectronics and Molecular Engineering of the Ministry of Education, Department of Chemistry, Tsinghua University, Beijing, 100084 ChinaE-mail: lyjiao@mail.tsinghua.edu.cnSearch for more papers by this author First published: 02 February 2017 https://doi.org/10.1002/adma.201604540Citations: 180Read the full textAboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable 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Learn more.Copy URL Share a linkShare onFacebookTwitterLinkedInRedditWechat Graphical Abstract The controlled synthesis of high-quality multilayer (ML) MoS2 flakes with gradually shrinking basal planes by chemical vapor deposition (CVD) is demonstrated. These CVD-grown ML MoS2 flakes exhibit much higher mobility and current density than mechanically exfoliated ML flakes due to the reduced contact resistance which mainly resulted from direct contact between the lower MoS2 layers and electrodes. Citing Literature Supporting Information As a service to our authors and readers, this journal provides supporting information supplied by the authors. Such materials are peer reviewed and may be re-organized for online delivery, but are not copy-edited or typeset. Technical support issues arising from supporting information (other than missing files) should be addressed to the authors. Filename Description adma201604540-sup-0001-S1.pdf1.4 MB Supplementary Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article. Volume29, Issue13April 4, 20171604540 RelatedInformation