Graphene-based temperature sensors suspended by anodic aluminum oxide

In this paper, we investigate the substrate effect in graphene temperature sensors. Recently, there have been many research studies done on temperature sensors using the nanofabrication technique. However, the sensitivity and response time need to be improved. In this study, we propose a new type of temperature sensor that consists of graphene and Anodic Aluminum Oxide (AAO). In this device, graphene and AAO are used as the sensing material and the substrate, respectively. We characterize the sensitivity and the response time using the experimental results and simulation data. The real-time resistance change of graphene is monitored depending on the temperature, and the response time is also analyzed by COMSOL Multiphysics. To confirm the porous substrate effect, we compare the device performance of the AAO substrate to the performance of the glass substrate. From these results, the suspended graphene on the AAO substrate shows about two times higher sensitivity and a much faster response time than the glass substrate.