To understand the effect of helium ion irradiation on the microstructure and mechanical properties of tungsten (W), recrystallized W is irradiated by 80 keV helium ions with fluence of 3 × 1015, 3 × 1016 and 3 × 1017 ions/cm2. Transmission electron microscope (TEM) observation suggests that large numbers of dislocation loops are generated in W and the size of the dislocation loop increases with irradiation fluence. The results of micro-hardness and nanoindentation show that the irradiation hardening can be clearly detected after helium ion bombardment with displacements per atom (dpa) of <1 dpa. However, this hardening effect becomes milder when the irradiation fluence is further increased. Finally, the irradiation hardening behavior of W is analyzed by the dispersed barrier model and the calculated results follow the same trend with that of nanoindentation.