A high-resolution resonant MEMS accelerometer

This paper reports on a vacuum packaged resonant MEMS accelerometer that demonstrates some of the highest sensitivities reported to-date and a ∼7x scale factor enhancement relative to a recently reported prototype, benefiting from a larger proof mass and improved leverage amplification factor. The device describes a scale factor of 960 Hz/m/s2 over a dynamic range of approximately +/− 0.5 m/s2. The experimentally measured intrinsic noise limited resolution of the accelerometer is less than 150 ng/√Hz in the frequency range from < 1 Hz up to 50 Hz.