Role of the PbTiO3 Seed Layer on the Crystallization Behavior of PZT Thin Films

The role of a highly crystalline and oriented lead titanate ( PTO ) seed layer on the subsequent phase and texture evolution of lead zirconate titanate ( PZT ) thin films is investigated in situ using X‐ray diffraction ( XRD ) during crystallization. Crystalline PTO seed layers were first prepared via a 2‐methoxyethanol route. Amorphous PZT with a Zr/Ti ratio of 52/48 was then deposited on the seed layer using the same synthesis route and subsequently crystallized in situ during XRD . During heating, a tetragonal‐to‐cubic transformation of the seed layer occurs prior to the formation of perovskite PZT . Subsequent nucleation of the crystalline PZT occurs in the cubic phase. Simultaneous to nucleation of PZT , development of a dominant 100 texture component was observed in the PZT phase of the thin films. The results indicate that 100 textured PTO nucleates 100 texture of PZT thin films during crystallization.