材料科学
光学
激光线宽
激光器
光刻
步进电机
平版印刷术
光电子学
波导管
波长
半导体激光器理论
电子束光刻
抵抗
半导体
图层(电子)
纳米技术
复合材料
物理
作者
Kais Dridi,Abdessamad Benhsaien,Jessica Zhang,Trevor J. Hall
出处
期刊:Optics Letters
[Optica Publishing Group]
日期:2014-10-22
卷期号:39 (21): 6197-6197
被引量:4
摘要
We demonstrate a split-contact corrugated ridge waveguide InGaAsP distributed feedback laser at 1560 nm. The laser cavity has been defined with uniform third-order gratings etched along the sidewalls of the ridge waveguide. The gratings were fabricated using a standard I-line stepper lithography technique along with an inductively coupled reactive ion-etching process. Stable single-mode operation has been achieved with side-mode suppression ratios ≥50 dB, output powers ≥7 mW, a wavelength tuning range ≥2.3 nm, and narrow linewidths (≤140 kHz) for different biasing conditions, with a minimum of 70 kHz. The effect of p-contact partition on device performance is also studied.
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