晶片切割
包装工程
研磨
制造工程
薄脆饼
模具准备
模具(集成电路)
过程(计算)
微电子机械系统
备品备件
半导体工业
机械工程
电子包装
工程类
计算机科学
材料科学
电气工程
纳米技术
操作系统
出处
期刊:European Microelectronics and Packaging Conference
日期:2009-06-15
卷期号:: 1-4
被引量:16
摘要
DISCO Corporation is a leading manufacturer for equipment and tools for wafer thinning and dicing. “Bringing science to comfortable living by Kiru (Dicing), Kezuru (Grinding) and Migaku (Polishing)” is DISCO's mission. By combining these three core technologies, DISCO provides total solutions to meet the more and more demanding requirements of the Semiconductor industry in terms of manufacturing thin dies with high die-strengths and several new approaches for advanced packaging. When developing such processes, circumstances for the total process flow from front-end to packaging are actively taken into consideration. This article describes various process flows which on the one hand are implemented in the industry as state of the art processes (Conventional process, DBG), but on the other hand also processes which are considered for the future to meet the upcoming requirements for the packaging industry, such as TSV (Through Silicon Via) for die-stacking, thin power devices and the combination of MEMS- and logic devices in one package.
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