脉冲激光沉积
材料科学
沉积(地质)
激光器
纳米结构
光电子学
兴奋剂
薄膜
基质(水族馆)
退火(玻璃)
成核
通量
纳米技术
激光烧蚀
光学
冶金
化学
古生物学
有机化学
地质学
物理
海洋学
生物
沉积物
作者
Adawiya J. Haider,Allaa A. Jabbar,Ghalib A. Ali
出处
期刊:Journal of physics
[IOP Publishing]
日期:2021-03-01
卷期号:1795 (1): 012015-012015
被引量:28
标识
DOI:10.1088/1742-6596/1795/1/012015
摘要
Abstract In this review, the theoretical and experimental aspects of ZnO nanostructures production using pulsed laser deposition techniques were presented. It reviewed the work principles of pulse laser deposition technique (PLD) method, physical procedures such as ablation, and plasma plume creation accompanying the deposition of pure and doped ZnO from target to substrate material. Many ways of deposition and elements that affecting on the properties of thin films like the temperature of substrate, laser fluence (laser energy density), pulse repetition rate, pressure of oxygen in chamber, time of deposition process and post growth annealing which modify the deposition active factors like nucleation, and crystallization.
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