Lithium phosphorus oxynitride thin films for rechargeable lithium batteries: Applications from thin-film batteries as micro batteries to surface modification for large-scale batteries

This article reviews the technological trends in lithium-phosphorous-oxynitride (LiPON)-film-based thin-film batteries. LiPON films have been actively used in thin-film batteries containing lithium anodes because of their excellent contact stability with lithium and the advantages offered for thin-film formation. In addition, studies that have focused on the use of LiPON films as protective layers to prevent surface deterioration of electrode materials are explored. Various studies have been conducted using LiPON films to improve the performance degradation of rechargeable lithium batteries due to a side reaction between the electrode material and the electrolyte. Finally, the technical tasks required for enhancing the utilization of LiPON films in the field of thin-film batteries or electrode surface modification are summarized.