Frequency-Modulated MEMS Gyroscopes: A Review

As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based on MEMS craft has attracted more and more attention in recent years, owing to its advantages in low power consumption, low temperature sensitivity, very high bandwidth, and excellent scale factor stability. This review summaries the history and latest development of the FM gyroscope research. The theory of the frequency modulation effect of the Coriolis coupling is provided based on the method of rotating wave approximation in a systematic and explicit way. Typical FM gyroscope operation modes, such as QFM, IFM, LFM, and their working principles are introduced minutely. The error sources of FM gyroscopes, and the characters comparison between FM and AM gyroscopes are discussed in detail as well.