Diamond Films: Chemical Vapor Deposition for Oriented and Heteroepitaxial Growth

1. Overview of Oriented Growth 2. Diamond - Structure and CVD Growth 3. Microwave Plasma CVD Reactors 4. Other CVD Reactors 5. Crystal Orientations and Film Surface Morphology 6. Formation of Twins 7. Homoepitaxial Growth 8. Surface Reconstruction 9. Epitaxial Growth on cBN, Ni, and Other Substrates 10. Diamond Nucleation 11. HOD Film Growth 12. Oriented Growth on Noble Metals 13. Properties and Applications of Heteroepitaxial Diamond Films 14. Conclusion APPENDICES Notations and units Plasma Properties of diamond and other semiconducting materials Reconstruction of diamond surfaces Materials constants Phase diagrams of carbon and metals Carbon solubilities in metals Biasing and growth conditions for diamond growth