目视检查
自动光学检测
自动X射线检查
深度学习
软件检查
人工智能
质量(理念)
计算机科学
曲面(拓扑)
机器视觉
光学(聚焦)
软件
工程类
半导体器件制造
工程制图
计算机视觉
机器学习
图像处理
图像(数学)
软件质量
软件开发
数学
几何学
程序设计语言
薄脆饼
认识论
哲学
物理
光学
电气工程
作者
Xiaoqing Zheng,Song Zheng,Yaguang Kong,Jie Chen
标识
DOI:10.1007/s00170-021-06592-8
摘要
Manual surface inspection methods performed by quality inspectors do not satisfy the continuously increasing quality standards of industrial manufacturing processes. Machine vision provides a solution by using an automated visual inspection (AVI) system to perform quality inspection and remove defective products. Numerous studies and works have been conducted on surface inspection algorithms. With the advent of deep learning, a number of new algorithms have been developed for better inspection. In this paper, the state-of-the-art in surface defect inspection using deep learning is presented. In particular, we focus on the inspection of industrial products in semiconductor, steel, and fabric manufacturing processes. This work makes three contributions. First, we present the prior literature reviews on vision-based surface defect inspection and analyze the recent AVI-related hardware and software. Second, we review traditional surface defect inspection algorithms including statistical methods, spectral methods, model-based methods, and learning-based methods. Third, we investigate recent advances in deep learning-based inspection algorithms and present their applications in the steel, fabric, and semiconductor industries. Furthermore, we provide information on publicly available datasets containing surface image samples to facilitate the research on deep learning-based surface inspection.
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