A Modified H2 Emissions Circuit Model for BAW Devices

We propose a modified extended-Butterworth-Van-Dyke (mEBVD) circuit to model an arbitrarily shaped BAW device’s second harmonic emissions (H2). The circuit is synthesized from the rational approximation of the resonator’s admittance. The model represents each lateral mode with an RLC circuit and a current-controlled-current source (CCCS). We validate the model using 3D FEM simulations and experimental measurements.