热电堆
响应时间
共发射极
光电子学
材料科学
红外线的
功率消耗
炸薯条
微电子机械系统
环境科学
功率(物理)
计算机科学
电气工程
光学
工程类
物理
计算机图形学(图像)
量子力学
作者
Liyang Feng,Yanxiang Liu,Yi Wang,Hong Zhou,Ming C. Wu,Tie Li
出处
期刊:iScience
[Elsevier]
日期:2023-10-23
卷期号:26 (11): 108293-108293
被引量:6
标识
DOI:10.1016/j.isci.2023.108293
摘要
Human physiological metabolic status can be obtained by monitoring exhaled CO2 concentration, but current CO2 sensors have disadvantages such as large size, high power consumption, and slow response time, which limit their application in wearable devices and portable instruments. In this article, we report a small size, good performance, and large range CO2 infrared gas sensor that integrates a high emissivity MEMS emitter chip, a high detectivity thermopile chip, and a high coupling efficiency optical chamber to achieve high efficiency optical-thermal-electrical conversion. Compared with typical commercial sensors, the size of the sensor can be reduced by approximately 80% to only 10 mm × 10 mm × 6.5 mm, with the advantages of low power consumption and fast response speed. Further, a monitoring system for end-tidal CO2 concentration installed on a mask was developed using this sensor, and good results were achieved.
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