14‐2: Development of High Mobility and Reliability Metal Oxide TFT for 13.2 inch AMOLED Display

The 13.2 inch AMOLED panel with 262 ppi has been fabricated with the high mobility metal oxide TFTs (thin film transistors). The high mobility oxide TFTs have high mobility ~34cm 2 /Vs. On Gen. 6 glass, a small Vth variation with channel length 3.5um has been obtained. Moreover, the high mobility oxide TFT shows small Vth shift under positive/negative bias temperature stress (PBTS/NBTS).