纳米-
聚焦离子束
材料科学
化学气相沉积
纳米技术
纳米尺度
沉积(地质)
聚苯乙烯
离子
化学
复合材料
聚合物
古生物学
有机化学
沉积物
生物
作者
R. Kometani,Takayuki Hoshino,Kazuhiro Kanda,Yuichi Haruyama,Takashi Kaito,Jun-ichi Fujita,Masahiko Ishida,Yukinori Ochiai,Shinji Matsui
标识
DOI:10.1016/j.nimb.2005.03.074
摘要
Abstract High performance nano-tools are very important for nano-scale operations and analysis in various researches. To achieve best performance, tools should be made as three-dimensional (3-D) nano-structured devices. Therefore, we have fabricated 3-D nano-tools by using focused-ion-beam chemical-vapor-deposition (FIB-CVD). Most recently, we used FIB-CVD to fabricate a novel 3-D nano-tool, a nano-net. Using this nano-net, we successfully captured polystyrene microspheres (diameter: 2.0 μm).
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