Single-shot multilayer measurement by chromatic confocal coherence tomography

We propose Chromatic Confocal Coherence Tomography as a new system able to achieve corrected topography measurements of multi-layered specimens by measuring position, thickness and refractive index of each layer simultaneously at each measurement point. This feature is achieved by a combination of a chromatic confocal scheme and an interferometric one. The numerical aperture of the used microscope objective has a significant effect on the measurement uncertainty. Hence, its contribution to uncertainty is discussed in more detail.