表面微加工
材料科学
激光烧蚀
激光器
氮化物
通量
表面光洁度
纤维
表面粗糙度
烧蚀
光纤激光器
光电子学
光学
复合材料
制作
医学
物理
工程类
病理
图层(电子)
航空航天工程
替代医学
作者
Florian Preusch,Benedikt Adelmann,Ralf Hellmann
出处
期刊:Micromachines
[Multidisciplinary Digital Publishing Institute]
日期:2014-11-10
卷期号:5 (4): 1051-1060
被引量:43
摘要
We report on high precision high speed micromachining of Al2O3 and AlN using pulsed near infrared fiber laser. Ablation thresholds are determined to be 30 J/cm2 for alumina and 18 J/cm2 for aluminum nitride. The factors influencing the efficiency and quality of 3D micromachining, namely the surface roughness, the material removal rate and the ablation depth accuracy are determined as a function of laser repetition rate and pulse overlap. Using a fluence of 64 J/cm², we achieve a material removal rate of up to 94 mm³/h in Al2O3 and 135 mm³/h in AlN for high pulse overlaps (89% and 84%). A minimum roughness of 1.5 μm for alumina and 1.65 μm for aluminum nitride can be accomplished for medium pulse overlaps (42% to 56%). In addition, ablation depth deviation of the micromachining process of smaller than 8% for alumina and 2% for aluminum nitride are achieved. Based on these results, by structuring exemplarily 3D structures we demonstrate the potential of high quality and efficient 3D micromachining using pulsed fiber laser.
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