雕刻
SPARK(编程语言)
接口
微电子机械系统
快速成型
材料科学
机械加工
工程制图
纳米技术
计算机科学
机械工程
工程类
复合材料
计算机硬件
程序设计语言
作者
Rolf Wüthrich,Kazuhiro Fujisaki,Ph Couthy,Lucas A. Hof,Hannes Bleuler
标识
DOI:10.1088/0960-1317/15/10/s04
摘要
Spark assisted chemical engraving (SACE) is a method for 3D microstructuring of glass or other non-conductive materials with high aspect ratio and smooth surface quality. It is applicable for rapid prototyping of microfluidic devices, for MEMS interfacing and similar applications. Typical feature size is in the hundreds of micrometres, down to a few tens of micrometres. It is a table-top technology requiring no clean rooms and no masks and with very modest space usage. It is thus well suited for microfactories. This paper gives a basic introduction to SACE and some machining examples.
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