材料科学
发光二极管
光电子学
二极管
宽禁带半导体
表面粗糙度
蚀刻(微加工)
激光器
表面光洁度
光学
纳米技术
复合材料
图层(电子)
物理
作者
Tetsuo Fujii,Yan Gao,Rajat Sharma,Evelyn L. Hu,Steven P. DenBaars,Shuji Nakamura
摘要
Roughened surfaces of light-emitting diodes (LEDs) provide substantial improvement in light extraction efficiency. By using the laser-lift-off technique followed by an anisotropic etching process to roughen the surface, an n-side-up GaN-based LED with a hexagonal “conelike” surface has been fabricated. The enhancement of the LED output power depends on the surface conditions. The output power of an optimally roughened surface LED shows a twofold to threefold increase compared to that of an LED before surface roughening.
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