绝缘体上的硅
硬化(计算)
辐射硬化
辐射
材料科学
工程物理
计算机科学
硅
优势和劣势
光电子学
纳米技术
物理
光学
心理学
社会心理学
图层(电子)
标识
DOI:10.1016/0167-9317(88)90016-0
摘要
Silicon-on-insulator technologies are of particular interest in terms of radiation hardening. First, the radiation effects basic phenomena will be emphasized, in relation with the device structures relevant to the SOI. As an introduction, prospective results of a SIMOX technology prototype are presented. These results can be compared with those from the literature, based on SIMOX or other structures. Advantages and weaknesses of these structures are discussed.
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