A 5.5Mpixel 100 frames/sec wide dynamic range low noise CMOS image sensor for scientific applications

In this paper we describe a 5.5Mpixel 100 frames/sec wide-dynamic-range low-noise CMOS image sensor (CIS) designed for scientific applications. The sensor has 6.5μm pitch 5T pixels with pinned photodiodes and integrated microlenses. The 5T pixel architecture enables low noise rolling and global shutter operation. The measured peak quantum efficiency of the sensor is greater than 55% at 550nm, the Nyquist MTF is greater than 0.4 at 550nm, and the linear full well capacity is greater than 35ke-. The measured rolling and global shutter readout noise are 1.28e- RMS and 2.54e- RMS respectively at 30 f/s and 20°C. The pinned photodiode dark current is less than 3.8pA/cm² at 20°C. The sensor achieves an intra-scene linear dynamic range in rolling shutter operation of greater than 86dB (20000:1) at room temperature. In global shutter readout the shutter efficiency is greater than 1000:1 with 500nm illumination.