材料科学
氮化硼
场电子发射
电场
光电子学
涂层
氮化物
氮化镓
宽禁带半导体
表面粗糙度
纳米技术
复合材料
图层(电子)
电子
量子力学
物理
作者
Haitao Luo,Shingo Funakawa,Wenzhong Shen,Takashi Sugino
出处
期刊:Journal of vacuum science & technology
[American Vacuum Society]
日期:2004-07-01
卷期号:22 (4): 1958-1963
被引量:8
摘要
The field emission (FE) characteristics of boron nitride (BN) nanofilms grown on flat and roughened GaN substrates are investigated. A significant improvement is achieved by the BN nanocoating sample in contrast to a BN thick coating sample. In order to obtain a large field enhancement factor, H2 plasma treatment is employed to roughen the surface of GaN substrates. The roughened GaN substrates are demonstrated to be applicable to the BN nanofilms in further improving FE performance. An apparent enhancement is observed from the FE properties of BN nano/roughened GaN compared with those of BN nano/flat GaN and an optimum turn-on electric field of 3.2 V/μm is thus achieved.
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