四极杆质量分析仪
校准
计量学
分析化学(期刊)
分压
质谱法
探测器
选择性离子监测
停留时间
分光计
电子倍增器
四极
化学
光学
物理
原子物理学
医学
有机化学
临床心理学
量子力学
色谱法
气相色谱-质谱法
氧气
作者
Dong Meng,Wenjun Sun,Chengyao Wu,Tianyou Feng,Suzhao Zhang,Yongjun Cheng
标识
DOI:10.1016/j.measen.2021.100168
摘要
This study performed the calibration of QMG700 quadrupole mass spectrometer (QMS) against the ultrahigh vacuum (UHV) partial pressure standard. The research object was the sensitivity, noise level and minimum detectable partial pressure (MDPP) in the secondary electron multiplier (SEM) detector mode. This work was investigated in the SCAN and multiple ion detection (MID) operation modes, and scan speed and the dwell time were 50 ms/amu and 50 ms, respectively. The SEM voltage was changed in the range of (1100–3000) V. The experiment was carried out over the partial pressure range of 10−9 Pa to 10−7 Pa using He. The results demonstrated a significant correlation between the QMS metrological characteristics and its operation mode. This study was conducted according to the ISO TS 20175: 2018. The results showed a significant dependence between the metrological characteristics of QMS and its operation mode.
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