蓝宝石
材料科学
表面微加工
微流控
飞秒
制作
微加工
激光器
光电子学
阳极连接
钛宝石激光器
纳米技术
光学
硅
医学
物理
病理
替代医学
作者
Ahmed Ramadan El-Gohary,Erica Block,Jeff Squier,Mohammad Koneshloo,Rajib K. Shaha,Carl P. Frick,John Oakey,Saman A. Aryana
出处
期刊:Applied Optics
[The Optical Society]
日期:2020-10-13
卷期号:59 (30): 9285-9285
被引量:9
摘要
Due to its hardness, strength, and transparency, sapphire is an attractive material for the construction of microfluidic devices intended for high-pressure applications, but its physiochemical properties resist traditional microfabrication and bonding techniques. Here a femtosecond pulsed laser was used to directly machine fluidic channels within sapphire substrates and to form bonds between machined and flat sapphire windows, resulting in the creation of sealed microfluidic devices. Sapphire-sapphire bond strength was determined by destructive mechanical testing, and the integrity of the bond was verified by the capillary filling of the channel with air and ethanol. This combination of optical micromachining and bonding establishes a fully integrated approach to the fabrication of sapphire-based microfluidic systems.
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