A Review on Lithium Phosphorus Oxynitride

Lithium phosphorus oxynitride (LiPON) has paved the way for thin film solid-state battery technology development and has shown application in a large range of fields since its first reported synthesis in 1993. The term LiPON describes the family of materials with the general formula of LixPOyNz offering a great range of stoichiometries with varying properties. Understanding how the properties of LiPON are affected by different preparation methods is important for tuning this material to fit the required application. It is also useful to understand the LiPON relation between the amorphous structure and ionic conductivity, as well as the electrochemically degradation in contact with electrode materials. This review summarizes various methods of synthesizing LiPON and evaluates them on the basis of multiple properties of the resulting material. Structure–property relationships are identified to categorize the various LiPON stoichiometries that have been synthesized. Possible lithium ion conduction pathways and electrochemical degradation mechanism in LiPON are discussed. Representative applications of LiPON films are also introduced. At the end of this review, insights for future research into LiPON materials are provided.