Laser-lithography on non-planar surfaces

An extensively modified laser-lithography system specially developed for realization of micro-optical profiles on non-planar surfaces is presented. This extended system offers new possibilities of fabricating micro-optical elements without the technology related restriction of surface shape that existed so far. A diffractive lens on a convex spherical substrate is designed and fabricated as an example for hybrid achromatic refractive-diffractive elements to demonstrate the functionality of the system and the wide range of possible new applications.