First-principles approach to x-ray active optics: design and verification

This paper presents the first-principles design approach for x-ray active optics. The feature of deterministic modulation enables the simulation-modulation cycle in place of the measurement-modulation feedback loops used in traditional active optics. We apply an x-ray mirror with localized thermal elastic deformation to validate the idea. Our experiments have demonstrated that the new active optics have the potential to outperform the accuracy of surface shape metrology instruments.