ILT for HVM: history, present and future

ILT was developed by the team led by the author starting from 2003; Simulation and wafer printing demonstrated its superiority over traditional Manhattan OPC; But its adoption in HVM was hinder by long run time and long write-time; Almost 20 decades later, with the rise of GPU and ML, and the successful development of MBMW, all the issues have a solution. The author reviewed the history of ILT, survey the current status and provide some personal predictions for ILT in HVM.