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1880 积分 2024-07-03 加入
3D-NAND wafer process monitoring using high voltage SEM with auto e-Beam tilt technology
1个月前
已完结
Machine learning and hybrid metrology using HV-SEM and optical methods to monitor channel hole tilting in-line for 3D NAND wafer production
1个月前
已完结
Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride
3个月前
已完结
Highly Scalable Metal Induced Lateral Crystallization (MILC) Techniques for Vertical Si Channel in Ultra-High (> 300 Layers) 3D Flash Memory
3个月前
已完结
Education Abstract: Thermal Challenges and Mitigation in 3D DRAM
3个月前
已完结
An approach to reduce surface charging with cryogenic plasma etching using hydrogen-fluoride contained gases
4个月前
已完结
Stability and plasma etching behavior of yttrium-based coatings by air plasma spray process
4个月前
已完结
Initiation mechanism of arcing generated in RF capacitively coupled plasma
4个月前
已完结
Effect of low frequency voltage waveform on plasma uniformity in a dual-frequency capacitively coupled plasma
5个月前
已完结
Spontaneous asymmetry effect induced by uniform magnetic fields in capacitively coupled plasmas under perfectly symmetric conditions
5个月前
已完结
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