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20 积分 2022-11-26 加入
Enabling CMOS Scaling Towards 3nm and Beyond
10个月前
已完结
Pushing the Limit of Molecular Dynamics with Ab Initio Accuracy to 100 Million Atoms with Machine Learning
11个月前
已完结
REACTION SIMULATION AND EXPERIMENT OF A Cl2/Ar INDUCTIVELY COUPLED PLASMA FOR ETCHING OF SILICON
11个月前
已完结
Process optimization of the Si0.7Ge0.3 Fin Formation for the STI first scheme
11个月前
已完结
Thin film deposition techniques for polymeric membranes– A review
11个月前
已完结
Molecular dynamics simulation for reactive ion etching of Si and SiO2 by SF5+ ions
1年前
已完结
Review and future perspective of feature scale profile modeling for high-performance semiconductor devices
1年前
已完结
Experimentally validated computations of simultaneous ion and fast neutral energy and angular distributions in a capacitively coupled plasma reactor
1年前
已完结
Modeling of microtrenching and bowing effects in nanoscale Si inductively coupled plasma etching process
1年前
已完结
Device-scale atomistic modelling of phase-change memory materials
1年前
已完结
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