Effect of the oxygen pressure on the microstructure and optical properties of ZnO films prepared by laser molecular beam epitaxy

光致发光 材料科学 分析化学(期刊) 分子束外延 氧气 微观结构 薄膜 拉曼光谱 基质(水族馆) 透射电子显微镜 发光 发射光谱 紫外线 扫描电子显微镜 激光器 发射强度 吸收边 带隙 谱线 光学 光电子学 外延 化学 纳米技术 复合材料 物理 有机化学 海洋学 色谱法 图层(电子) 天文 地质学
作者
Changzheng Wang,Zhong Chen,Haiquan Hu,Dong Zhang
出处
期刊:Physica B-condensed Matter [Elsevier BV]
卷期号:404 (21): 4075-4082 被引量:43
标识
DOI:10.1016/j.physb.2009.07.165
摘要

A series of ZnO films were prepared on the Si (1 0 0) or glass substrate at 773 K under various oxygen pressures by using a laser molecular beam epitaxy system. The microstructure and optical properties were investigated through the X-ray diffraction, Raman spectrometer, scanning electron microscope, ultraviolet–visible spectrophotometer and spectrofluorophotometer. The results showed that ZnO thin film prepared at 1 Pa oxygen pressure displayed the best crystalinity and all ZnO films formed a columnar structure. Meanwhile, all ZnO films exhibited an abrupt absorption edge near the wavelength of 380 nm in transmission spectra. With increasing the oxygen pressure, the transmission intensity changed non-monotonically and reached a maximum of above 80% at 1 Pa oxygen pressure, based on which the band gaps of all ZnO films were calculated to be about 3.259–3.315 eV. Photoluminescence spectra indicated that there occurred no emission peak at a low oxygen pressure of 10−5 Pa. With the increment of the oxygen pressure, there occurred a UV emission peak of 378 nm, a weak violet emission peak of 405 nm and a wide green emission band centered at 520 nm. As the oxygen pressure increased further, the position of UV emission peak remained and its intensity changed non-monotonically and reached a maximum at 1 Pa. Meanwhile the intensity of green emission band increased monotonically with increasing the oxygen pressure. In addition, it was also found that the intensity of UV emission peak decreased as the measuring temperature shifted from 80 to 300 K. The analyses indicated that the UV emission peak originated from the combination of free excitons and the green emission band originated from the energy level jump from conduction band to OZn defect.
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