Computational Analysis of a Piezo-electrically Actuated Valve-less Micropump for Micro-fluidic Applications

Computational analysis of a piezo-electrically actuated valve-less micropump is carried out for microfluidic applications.The effect of the operating parameter frequency on the performance of micropump is studied.The valve-less micropump consists of nozzle/diffuser elements; the pump chamber; a thin membrane (diaphragm) and a piezoelectric disc, PZT 5A of diameter 12 mm as the actuator.The complete electric-fluid-solidcoupling model is simulated with the commercial finite element analysis software COMSOL Multiphysics 5.0 to investigate the performance of the micropump.